Detects Notches and Eccentricity of Wafers
This application uses a Side-view Fiber Sensor with a homogenous area beam. This Sensor uses a change in the amount of interrupted lights caused by notches and eccentricity to enable detecting the position of notches and eccentricity of wafers. The amount of interrupted light by wafers is proportional in the 11-mm-wide detection area. The special optical components enable homogenous area beams in the detection area.