Semiconductor Wafer Movement

Push button type photomicro sensors are used to detect presence of semiconductor wafers.

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BS5-P Series Pushbutton-type Sensors
The BS5-P series push button type photomicro sensors are capable of accurate detection regardless of material, color, or reflectivity of target objects. Optical detection by button operation guarantees a higher mechanical life cycle than traditional mechanical switches, up to 5 million operations. The inclusion of 4 led operation indicators (side: 2, top: 2) allows better indication of operation status and the stainless steel mounting brackets provide higher durability during installation and operation.