Mount ID Tags (Data Carriers) to dedicated cassettes that contain (several dozen) disks. Write product information, lot information, work instructions for each process, process completion flags, and instructions for the next process to the ID Tags. In each process, read the information from the ID Tags using R/W Heads mounted to the machinery, and perform processing or inspection based on this information. For inspection processes, write the inspection results (i.e., OK or NG) to the ID Tags. At the end of each process, write instructions relating to process completion flags and the next process as appropriate. At the final process, read all the information in the ID Tags, and store it in the host for lot control.