The alignment mark is captured and the coordinates of the camera and stage are automatically calibrated.

The difference in two camera views and flexible camera attachment (rotation and tilt) also supported.

Auto calibration result can be verified visually.
Easy to verify whether or not calibration was performed accurately, one of the factors for alignment problems.

Alignment operation can be replicated on a PC.
The operation can be verified in stages through simulation that splits the alignment operation into 4 steps.

• In the event of a problem, as long as you have an image, you can use the PC setup software to check the alignment operation at your desk.
  This is convenient for determining the location of the source of the problem.
• By being able to check the output values, you can tell whether the problem is caused by image processing or whether it originates in the device.

Sample setting data saved with basic alignment conditions is available.
Default settings are easily created by changing conditions such as the marks used by the user.